EMMI微光显微镜是为IC失效分析设计的高灵敏度光发射显微镜.
EMMI微光显微镜*点
自动采集，简化发射采集和叠加操作
滤波功能去除热像素和噪音
校准数据表提高相机灵敏度
彩色重叠，多窗口视图
12bit数模实时成像
高灵敏度IR CCD图像传感器
高分辨率
低暗电流
EMMI微光显微镜探测器规格参数
Detector: Indium Gallium Arsenide (InGaAs)
Array Format: 320 (H) x 256 (V) Focal Plane Array
Pixel Size: 30 x 30 microns
Spectral Response: 900 to 1700 nanometers
QE: 80-85%
Optical Fill Factor: >90%
Thermal Stabilization: Thermoelectric
Window Material: BK-7 Optical Glass
Digital Data Real-time, 12-bit, Parallel
Integration Type: Snapshot Mode or Software Paced Sequential Readout
Integration Time: Range 1 µsec to 60 minutes
Sensitivity: NEI <1x1010 ph/cm2/sec
Damage Threshold: >1 W/cm2
Time to Initial Image: 30 sec @ 25°C ambient; ≤ 1 sec, not temperature dependent. Full stabilization <5 minutes.
Cooling Method: Multistage TEC
Power Dissipation: 12W typical
Power Connector: Custom controlled via emission software
